Maximum pumping flowrate

High pumping throu♈ghput is achieved with a compact body.

Excellent corrosion resistance

Resistant to corrosive gas because dispersed plating is used on the rotor (TMP-4203LMC, TMP-3403LMC). Dispersed plating with an excellent heat release characteristic prevents overheat of the rotor caused by high pumping throughput.
The surface of the rotor of the TMP-2🤡203LMC and TMP-1303LMC is nickel-plated to protect against co💫rrosive gas.

Compact power supply unit

49 % smaller and 50 % lighter as compared to Shimad💜zu's prev♌ious models

Measures against reaction products (optional)

Adding a function for control🍰ling the heater and cooling water to the pump allows it to be𓃲 kept at a high temperature and prevents the accumulation of reaction products inside it. The temperature controller is built into the compact power supply unit.

Various monitoring functions

LCD on the front panel displays the current, pumping speed, unbalance amount, errors, and other information. Equipped with a maintenance call timer.
Equipped with a RS-232C port on the front panel so that operation information can be loaded on a compu𝕴ter while the pump is operating. You can find abnormalities (increase of back pressure due to an adhered reaction product, etc.) in early stages if you compare the condition with the normal condition. This helps to protect the system from problems and keep it in good condition.

Network connection enabled

Equipped with RS-232C and RS-485 compliant serial communication ports, which enables operations to start/stop pumps, monitor operation status, and load operation history. Up to 32 pumps can be monitored using a single computer.
Using optional mo൩nitor software, multiple pumps can be monitored simultaneously.

Variable pump speed

The pump speed can be set within a range fꦍrom 25 to 100 % to adjust the pump's throughput. Speed setting can be applied to the adjustment of chamber pressure. Conductance valves can be reduced when used under given conditions.

Reduced power consumption • Compliant with major standards

• CE marking, TÜV
• NRTL (UL61010A-1)
• SEMI S2
• SEMI F47
• SEMI E74

Tuning-free

Read🌱justment of the power supply unit is unnecessary🔜 during pump cable replacement.

Battery-less

In the case of 🐬a power failure, magnetic levitation is maintained using regenerated power, thus reducing wear of the touch🐲down bearing.